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Kei Kiyokawa
Kei Kiyokawa
Toshiba
Analytical chemistry
Silicon
Materials science
Ion
Impurity
4
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Distribution of trace impurities in microvolumes and analysis of concentration using laser sputtered neutral mass spectrometry
2021
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Haruko Akutsu
Reiko Saito
Jun Asakawa
Kei Kiyokawa
Masato Morita
Tetsuo Sakamoto
Masaaki Fujii
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Study on the resonance ionization of vanadium using Laser-SNMS
2019
The Japan Society of Applied Physics
Kei Kiyokawa
Masato Morita
Yue Zhao
Yuki Shibata
Munetaka Taguchi
Tetsuo Sakamoto
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Matrix and element dependences of useful yield in Si and SiO2 matrices using laser-ionization sputtered neutral mass spectrometry
2018
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Reiko Saito
Haruko Akutsu
Jun Asakawa
Shiro Takeno
Kei Kiyokawa
Satoru Nagashima
Takeharu Ishikawa
Takahiro Kashiwagi
Akio Takano
Tetsuo Sakamoto
Masaaki Fujii
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Investigation into behavior of mobile ions in storage device using ToF-SIMS
2016
ISSM | International Symposium on Semiconductor Manufacturing
Nobuhito Kuge
Kei Kiyokawa
Megumi Kon
Tatsuo Izumi
Shinobu Ishimaru
Hideto Onuma
Makiko Tamaoki
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