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Guillaume Jullien
Guillaume Jullien
Photolithography
Distortion
Multiple patterning
Overlay
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3
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Achieving overlay budgets for double patterning
2009
Proceedings of SPIE
Andrew J. Hazelton
Nobutaka Magome
Shinji Wakamoto
Akira Tokui
C. Lapeyre
Sebastien Barnola
Guillaume Jullien
Vincent Salvetat
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Citations (3)
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