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R. Reiche
R. Reiche
Qimonda
Analytical chemistry
Atomic layer deposition
Annealing (metallurgy)
Secondary ion mass spectrometry
Capacitance
2
Papers
62
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Impact of interface variations on J-V and C-V polarity asymmetry of MIM capacitors with amorphous and crystalline Zr(1-x)AlxO2 films
2009
Microelectronic Engineering
Wenke Weinreich
R. Reiche
M. Lemberger
G. Jegert
Johannes Müller
Lutz Wilde
Steffen Teichert
Johannes Heitmann
Elke Erben
Lars Oberbeck
Uwe Schröder
Anton J. Bauer
H. Ryssel
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Citations (45)
Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers
2009
Journal of Applied Physics
Wenke Weinreich
Velislava A. Ignatova
Lutz Wilde
Steffen Teichert
M. Lemberger
Anton J. Bauer
R. Reiche
Elke Erben
Johannes Heitmann
Lars Oberbeck
Uwe Schröder
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Citations (17)
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