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A. Laessig
A. Laessig
Infineon Technologies
Resist
Immersion (virtual reality)
Process window
Lithography
Optical coating
2
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6
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Evaluation of 193nm immersion resist without topcoat
2006
Yayi Wei
Nickolay Stepanenko
A. Laessig
L. Voelkel
Michael Sebald
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Citations (4)
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