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Toshiki Kobayashi

Kanazawa Institute of Technology

12

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51

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Dependence of Ar+ and Ti+ Ion Energy Distributions on Ar Pressure in Inductively Coupled rf Plasma Enhanced Magnetron Sputtering

1999 Shinku
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Dependence of Ar+ and Ti+ Ion Energy Distribution on Cathode Current in Magnetron Sputtering Enhanced by Additional Plasma

1999 Shinku
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Hardness of compositionally nano-modulated TiN films

1999 Nanostructured Materials
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EFFECTS OF COIL DC POTENTIAL ON ION ENERGY DISTRIBUTION MEASURED BY AN ENERGY-RESOLVED MASS SPECTROMETER IN IONIZED PHYSICAL VAPOR DEPOSITION

1999 Journal of Vacuum Science and Technology
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Dependence of Ar+ and Ti+ Ion Energy Distribution on dc Self Bias of the rf Inductive Coil in Inductively-coupled rf Plasma Enhanced Magnetron Sputtering

1999 Shinku
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Participation of Phonon Scattering in ITO Films

1999 Shinku
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Study of Corona-Glow Discharge Transition Using Q-V Lissajous' and Dust-Figure Methods.

1999 Shinku
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Effects of CH4 addition to Ar–O2 discharge gases on resistivity and structure of ITO coatings

1998 Vacuum
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Effects of ionization power on ion energy distribution in ionized r.f. sputtering measured by an energy-resolved mass spectrometer

1998 Surface & Coatings Technology
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Citations (9)