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Baiying Yu
Baiying Yu
Tianjin University
Chemical vapor deposition
Surface micromachining
Diaphragm (structural system)
Pressure sensor
Integrated circuit
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2024
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Compensating methods of corner undercutting in silicon micromachining
1997
Proceedings of SPIE
Ganru Mao
Suying Yao
Hongwei Qu
Baiying Yu
Weixin Zhang
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