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Y. Karzhavin
Y. Karzhavin
Annealing (metallurgy)
Chemical vapor deposition
Engineering
Tungsten Compounds
Polycide
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Tungsten silicide gate stack optimization for 170-nm DRAM technology
2000
ASMC | Advanced Semiconductor Manufacturing Conference
V Rao
J. Morgan
W. Hoesler
J Barden
Y. Karzhavin
P. Van Holt
R. Petter
H. Ollendorf
K. Christensen
D. Ricks
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