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A. Uvais
A. Uvais
Toshiba
Ion implantation
Xenon difluoride
Xenon
Noble gas
Insulator (electricity)
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Extending Ion Source Life on High Current Ion Implant Tools with In-Situ Chemical Cleaning
2011
A. Uvais
M. Jinguji
Y. Sato
T. Yotsumoto
A. Botet
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