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Fumikazu Itoh
Fumikazu Itoh
Focused ion beam
Optics
Chemistry
Integrated circuit
Etching
6
Papers
23
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Methods for sample preparation
1995
Fumikazu Itoh
Toshihiko Nakata
Tohru Ishitani
Akira Shimase
Hiroshi Yamaguchi
Takashi Kamimura
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Practical phase‐shifting mask technology for 0.3 μm large scale integrations
1994
Journal of Vacuum Science & Technology B
Fumio Mizuno
Noboru Moriuchi
Morihisa Hoga
Yasuhiro Koizumi
Osamu Suga
Hidehiko Nakaune
Kazumi Kamiyama
Norio Hasegawa
Fumio Murai
Fumikazu Itoh
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Focused ion beam assisted etching of aluminum
1993
International Journal of The Japan Society for Precision Engineering
Fumikazu Itoh
Junzou Azuma
Satoshi Haraichi
Akira Shimase
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Focused Ion Beam Milling Technology for On-chip Wiring Modification System for LSI.
1992
International Journal of The Japan Society for Precision Engineering
Fumikazu Itoh
Akira Shimase
Satoshi Haraichi
Takahiko Takahashi
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Mechanism of ion impact photoemission change of Si and Al during focused ion beam milling of LSI
1991
Journal of Vacuum Science & Technology B
Fumikazu Itoh
Akira Shimase
Satoshi Haraichi
Takahiko Takahashi
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Two‐Dimensional Profile Simulation of Focused Ion‐Beam Milling of LSI
1990
Journal of The Electrochemical Society
Fumikazu Itoh
Akira Shimase
Satoshi Haraichi
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Citations (22)
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