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Roy Kort
Roy Kort
Metrology
Semiconductor device fabrication
Rigorous coupled-wave analysis
Optoelectronics
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Comprehensive BEOL control using scatterometry and APC
2015
Proceedings of SPIE
Padraig Timoney
Jamie Tsai
Sudhir Baral
Laertis Economikos
Alok Vaid
Haibo Lu
Byungcheol Kang
Paul Isbester
Prasad Dasari
Roy Kort
Naren Yellai
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