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A. Scheinemann
A. Scheinemann
Nuclear magnetic resonance
Ion implantation
Leakage (electronics)
Annealing (metallurgy)
Dislocation
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A comprehensive study of the impact of dislocation loops on leakage currents in Si shallow junction devices
2015
Journal of Applied Physics
C. Nyamhere
A. Scheinemann
Andreas Schenk
A. Scheit
F. Olivie
F. Cristiano
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