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bunmei sigemitu
bunmei sigemitu
Optics
Materials science
Oxidizing agent
Oxide
Electromagnetic shielding
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マスクブランクスの選択方法、露光マスクの形成方法、および半導体装置の製造方法
2001
Osamu Ikenaga
Takashi Kamo
Fumiaki Shigemitsu
takasi kamo
osamu ikenaga
bunmei sigemitu
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Correction method and correction apparatus of the photomask
2001
moto suke miyosi
katuya okumura
yuuitirou yamazaki
takasi heiya
waka sugihara
itirou mori
takayuki sakai
bunmei sigemitu
singo kanemitu
makoto sekine
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Mask for exposing and production thereof
1992
Fumiaki Shigemitsu
bunmei sigemitu
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