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T. Alford
T. Alford
Arizona State University
Analytical chemistry
Amorphous solid
Sputter deposition
Thin film
Rutherford backscattering spectrometry
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The effect of Ta to Si ratio on magnetron sputtered Ta-Si-N thin films
1999
Journal of Electronic Materials
J. O. Olowolafe
I. Rau
Karl Unruh
C.P. Swann
Z.S Jawad
T. Alford
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