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H. S. Lufrman
H. S. Lufrman
Dopant
Polycide
Annealing (metallurgy)
Metallurgy
Inorganic chemistry
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Measurement of Lateral Dopant Diffusion in Rapid Thermal Annealed W-Polycide Gate Structures
1996
MRS Proceedings
T. Schiml
J. Bevk
M. Furtsch
G. Georgiou
Raymond A. Cirelli
W. M. Mansfield
P.J. Silverman
H. S. Lufrman
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