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Tajima Keiichiro

Materials science
Inorganic chemistry
Chemical engineering
Hybrid physical-chemical vapor deposition
Ion plating

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Effects of nitrogen doping on the properties of Si-doped DLC films

2018
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Effects of Si- and N-Incorporation on the Properties of DLC Films by Plasma-Enhanced Chemical Vapor Deposition Using H 2 as a Dilution Gas

2016 The Japan Society of Applied Physics
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