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Peter Dress
Peter Dress
SUSS MicroTec
Cavitation
Nanotechnology
Electronic engineering
Photomask
acoustic energy
8
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16
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Megasonic cleaning strategy for sub-10nm photomasks
2016
Jyh-Wei Hsu
Martin Samayoa
Peter Dress
Uwe Dietze
Ai-Jay Ma
Chia-Shih Lin
Rick Lai
Peter Chang
Laurent C. Tuo
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Study of droplet spray impact on a photomask surface
2012
Sherjang Singh
Uwe Dietze
Peter Dress
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Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties
2012
Hrishi Shende
Sherjang Singh
James Baugh
Uwe Dietze
Peter Dress
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