Old Web
English
Sign In
Acemap
>
authorDetail
>
G. Pohlers
G. Pohlers
Scanning electron microscope
Lithography
Secondary ion mass spectrometry
Wafer
Atomic force microscopy
1
Papers
1
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Post-lithography characterization of ArF resists for 45 nm node implant layers and beyond
2008
Proceedings of SPIE
A. Pikon
G. Pohlers
S. Derrough
F. Milesi
J. Foucher
Show All
Source
Cite
Save
Citations (1)
1