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Dirk Tobben
Dirk Tobben
Siemens
Dielectric
Electronic engineering
Materials science
Chemical vapor deposition
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5
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84
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A method of forming a self-aligned connection antifuse
2002
Axel Brintzinger
Dirk Tobben
Weber Stefan
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Plasma-assisted chemical vapor deposition of dielectric thin films for ULSI semiconductor circuits
1999
Ibm Journal of Research and Development
Donna Rizzone Cote
Son Van Nguyen
Anthony K. Stamper
Douglas S. Armbrust
Dirk Tobben
Richard A. Conti
Gill Yong Lee
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Citations (73)
High Temperature Subatmospheric Chemical Vapor Deposited Undoped Silicate Glass: A Solution for Next Generation Shallow Trench Isolation
1999
Journal of The Electrochemical Society
Li Qun Xia
Srinivas D. Nemani
Maria Galiano
S. Pichai
Shankar Chandran
Ellie Yieh
Donna Rizzone Cote
Richard A. Conti
D. Restaino
Dirk Tobben
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Citations (11)
Fusible pour semi-conducteur
1999
Axel Brintzinger
Dirk Tobben
Stefan J. Fishkill Weber
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Planarisierung einer Leiterbahnstruktur
1998
Matthias Ilg
Dirk Tobben
Peter Weigand
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