author-photo

S. Delachanal

5

Papers

12

Citations

Citation Trend

Filter By

Papers (4) Sort By

Journal Conference Others

Out-of-Plane Comb-Fingers for a Low-Noise, 0.12-MM2 Z-Axis Accelerometer Fabricated with a 3D MEMS Process

2019 MEMS | International Conference on Micro Electro Mechanical Systems
Show All
- Source
- Cite
- Save
Citations (0)
Small footprint, high-performance silicon capacitive accelerometer with a 3-D process

2018 MEMS | International Conference on Micro Electro Mechanical Systems
Show All
- Source
- Cite
- Save
Citations (3)
Ultra-fine pitch redistribution for 3D interposer

2013 EMPC | European Microelectronics and Packaging Conference
Show All
- Source
- Cite
- Save
Citations (1)
Ultra-fine pitch redistribution for 3D interposer

2013 EMPC | European Microelectronics and Packaging Conference
Show All
- Source
- Cite
- Save
Citations (1)