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Jusang Rhim
Jusang Rhim
Hanyang University
Ellipsometry
Haze
Situated
Mask inspection
Photolithography
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Ellipsometric inspection of the inner surface of pellicle-covered masks
2008
Proceedings of SPIE
Sangyouk Lee
Chulgi Song
Jusang Rhim
Hyoungjoo Lee
Jaisun Kyoung
Soo Bok Chin
Tae-Hyuk Ahn
Ilsin An
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