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Sean Mather
Sean Mather
University of Liverpool
Analytical chemistry
Atomic layer deposition
Dielectric
Annealing (metallurgy)
Chemistry
4
Papers
15
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Hafnia and alumina on sulphur passivated germanium
2015
Vacuum
M. Althobaiti
Sean Mather
Naser Sedghi
V.R. Dhanak
I. Z. Mitrovic
S. Hall
Paul R. Chalker
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Citations (2)
(Invited) Interface Engineering Routes for a Future CMOS Ge-Based Technology
2014
I. Z. Mitrovic
M. Althobaiti
Ayendra Weerakkody
Naser Sedghi
Stephen Hall
V.R. Dhanak
Sean Mather
Paul R. Chalker
D. Tsoutsou
Athanasios Dimoulas
Christoph Henkel
Eugenio Dentoni Litta
Per-Erik Hellström
Mikael Östling
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Citations (2)
Atomic layer deposition of Ti-HfO2 dielectrics
2013
Journal of Vacuum Science and Technology
M. Werner
Peter King
Sarah Hindley
Simon Romani
Sean Mather
Paul R. Chalker
Paul A. Williams
Jakob A. van den Berg
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Citations (5)
Low EOT GeO2/Al2O3/HfO2 on Ge substrate using ultrathin Al deposition
2013
Microelectronic Engineering
Sean Mather
Naser Sedghi
M. Althobaiti
I. Z. Mitrovic
V.R. Dhanak
Paul R. Chalker
S. Hall
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Citations (6)
1