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Sang Sik Moon
Sang Sik Moon
Samsung
Annealing (metallurgy)
Length measurement
Photoresist
Deblocking filter
Activation energy
1
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7
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Influence of activation energy on LER in chemically amplified KrF photoresists
2004
Jae Hyun Kim
Chang-Ho Lee
Seok Bong Park
Won Mi Kim
Sang Sik Moon
Kyung-Mee Kim
Shi Yong Lee
Sangwoong Yoon
Young-Ho Kim
Sang-mun Chon
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Citations (7)
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