Old Web
English
Sign In
Acemap
>
authorDetail
>
San-De Tzu
San-De Tzu
Proximity effect (audio)
Software
Miniaturization
Photolithography
Grid
1
Papers
2
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Achieving CDU requirement for 90-nm technology node and beyond with advanced mask making process technology
2005
San-De Tzu
Chung-Hsing Chang
Wen-Chi Chen
Karl-Heinz Kliem
Peter Hudek
Dirk Beyer
Show All
Source
Cite
Save
Citations (2)
1