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Jae-In Moon
Jae-In Moon
SK Hynix
NAND gate
Lithography
Integrated circuit
Overlay
Electronic engineering
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29
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Patterning with spacer for expanding the resolution limit of current lithography tool
2006
Wooyung Jung
Choidong Kim
Jae-Doo Eom
Sung-Yoon Cho
Sung-Min Jeon
Jong Hoon Kim
Jae-In Moon
Byung Seok Lee
Sungki Park
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