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Xiaoliang Zhao
Xiaoliang Zhao
Nankai University
air exposure
Semiconductor
Dielectric
Metal
Oxide
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Study of the role of air exposure time to interface oxide on HCl treated InAs (100) before atomic layer deposition of Al2O3
2021
Vacuum
Meiyi Jing
Tongkang Lu
Yong Sun
Xiaoliang Zhao
Ze Feng
Yitong Wang
Hui Liu
Weihua Wang
Feng Lu
Yahui Cheng
Genquan Han
Hong Dong
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