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Dan Yaffe
Dan Yaffe
KLA-Tencor
Metrology
Fidelity
Overlay
Engineering drawing
Computer vision
2
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26
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Optimized overlay metrology marks: theory and experiment
2004
IEEE Transactions on Semiconductor Manufacturing
Mike Adel
Mark Ghinovker
Boris Golovanevsky
Pavel Izikson
Elyakim Kassel
Dan Yaffe
Alfred M. Bruckstein
Roman Goldenberg
Yossi Rubner
Michael Rudzsky
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Citations (21)
Target noise in overlay metrology
2004
Joel L. Seligson
Mike Adel
Pavel Izikson
Vladimir Levinski
Dan Yaffe
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Citations (5)
1