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YinWeijun
YinWeijun
Materials science
Etching
Plasma
Analytical chemistry
BCL3
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Characteristics and mechanism of Al1.3Sb3Te etched by Cl2/BCl3 inductively coupled plasmas
2014
Microelectronic Engineering
ZhangZhonghua
SongSannian
SongZhitang
CHENGYan
Pengcheng
ZhangLing
CaoDuanchao
GuoXiaohui
YinWeijun
WuLiangcai
LIUBo
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