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Steffen Pauly
Steffen Pauly
University of Stuttgart
Etching
Ion source
Optoelectronics
Materials science
high rate
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Modelling and Study of a Microwave Plasma Source for High-rate Etching
2019
Steffen Pauly
Andreas Schulz
Matthias Walker
Günter E. M. Tovar
Monika Balk
Joachim Schneider
Klaus Baumgartner
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