Old Web
English
Sign In
Acemap
>
authorDetail
>
Shinpei Amasaki
Shinpei Amasaki
Photoresist
Chemistry
Ion beam
Radical
Photochemistry
4
Papers
7
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (2)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Study on modification process of photoresist by fluorocarbon ions and radicals
2011
Bulletin of the American Physical Society
Takuya Takeuchi
Shinpei Amasaki
Keigo Takeda
K. Ishikawa
Hiroki Kondo
M. Sekine
Masaru Hori
Show All
Source
Cite
Save
Citations (0)
Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist
2011
Japanese Journal of Applied Physics
Takuya Takeuchi
Shinpei Amasaki
Hiroki Kondo
Kenji Ishikawa
Hirotaka Toyoda
Makoto Sekine
Song-Yun Kang
Ikuo Sawada
Masaru Hori
Show All
Source
Cite
Save
Citations (5)
1