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V. Cosnier
V. Cosnier
SEMATECH
Leakage (electronics)
High-κ dielectric
Gate dielectric
Dielectric
CMOS
4
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57
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Thermal stability of high-k layers
2002
MRS Proceedings
Chao Zhao
V. Cosnier
P.J. Chen
O. Richard
Gert Roebben
J. W. Maes
S. Van Elshocht
Hugo Bender
E. Young
O. Van der Biest
Matty Caymax
Wilfried Vandervorst
S. De Gendt
Marc Heyns
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