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Y. Ebata
Y. Ebata
Hitachi
Deformation (engineering)
Curvature
Materials science
Silicon
Composite material
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Large displacement plastic deformation process for silicon parasol structure
2013
TRANSDUCERS | International Conference on Solid-State Sensors, Actuators and Microsystems
Takanori Aono
Y. Ebata
Shigeru Matsui
Tetsuya Watanabe
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