Old Web
English
Sign In
Acemap
>
authorDetail
>
Rhe Kiki
Rhe Kiki
Wafer
Electronic engineering
Lithography
Process (computing)
Resist
2
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
低k 1 のための重ね合わせメトロロジ:挑戦とソリューション
2012
Neumann Jens Timo
Lee Jongsu
Yang Kiho
Lee Byounghoon
Lee, Taehyeong
Park Jeongsu
Lim Chang-Moon
Yim Donggyu
Park SungKi
Janda Eric
Bhattacharyya Kaustuve
Ryu Chan-Ho
Min-Young Hong
Rhe Kiki
Geh Bernd
Show All
Source
Cite
Save
Citations (0)
1