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Dmitry .I. Astakhov
Dmitry .I. Astakhov
Engineering physics
Plasma
Engineering
Electronic engineering
Lithography
1
Papers
17
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EUV-Induced Plasma: A Peculiar Phenomenon of a Modern Lithographic Technology
2019
Applied Sciences
J Job Beckers
Tijn van de Ven
Ruud van der Horst
Dmitry .I. Astakhov
Vadim Yevgenyevich Banine
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Citations (17)
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