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I. Ochiai
I. Ochiai
Hitachi
Plasma
Dense plasma focus
Flattening
Photolithography
Wafer
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X-Ray Exposure System With Plasma Source For Microlithography
1989
Motoya Taniguchi
Ryuichi Funatsu
Akira Inagaki
Keiichi Okamoto
Yukio Kenbo
Yasuo Kato
I. Ochiai
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