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Pavel B. Baykov
Pavel B. Baykov
Sputter deposition
Condensed matter physics
Atomic physics
Physics
Cavity magnetron
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Substrate heating and cooling during magnetron sputtering of copper target
2016
Physics Letters A
Viktor I. Shapovalov
Andrey E. Komlev
Anastasia S. Bondarenko
Pavel B. Baykov
Vitaliy V. Karzin
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Citations (13)
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