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Kiyotaka Kasahara
Kiyotaka Kasahara
Oxide
Nitrogen
Plasma
Area density
Radical
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Formation of Ultrathin SiON Films on Si Substrates Having Different Orientations
2008
Japanese Journal of Applied Physics
Kiyotaka Kasahara
Naotaka Uchitomi
Takashi Shimizu
Kazuo Saki
Ichiro Mizushima
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