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M. Wandt
M. Wandt
Silicon
Dimensional metrology
Piezoresistive effect
Deep reactive-ion etching
Stiffness
2
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29
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Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components
2005
SENSORS | IEEE Sensors
Patrick Ruther
J. Bartholomeyczik
S. Trautmann
M. Wandt
Oliver Paul
Walter Dominicus
Roland Roth
K Seitz
Wolfgang Strauss
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The use of silicides for interconnect metallization and the elimination of contact-degradation in shallow-junction silicon devices
1987
R. Pretorius
J.C. Lombaard
J. McLeod
H. A. Ras
M. Wandt
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