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H. Lakatha
H. Lakatha
Semiconductor device
Auger effect
Analytical chemistry
Spectroscopy
Auger
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Auger voltage contrast imaging for the delineation of two-dimensional junctions in cross-sectioned metal–oxide–semiconductor devices
1998
Journal of Vacuum Science & Technology B
W.S.M. Werner
H. Lakatha
H. E. Smith
L. Letarte
V. Ambrose
J Baker
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