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B. Andrieu
B. Andrieu
Alcatel-Lucent
Inertial measurement unit
Deep reactive-ion etching
Through-silicon via
CMOS
Wafer
1
Papers
3
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High-productivity DRIE solutions for 3D-SiP and MEMS volume manufacturing
2006
M. Puech
J. M. Thevenoud
N. Launay
N. Arnal
P. Godinat
B. Andrieu
J. M. Gruffat
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Citations (3)
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