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Karlheinz Glorer
Karlheinz Glorer
Materials science
Lithography
Analytical chemistry
Nanotechnology
Nanosphere lithography
2
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65
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Nanocrystalline Diamond Nanoelectrode Arrays and Ensembles
2011
ACS Nano
Jakob Hees
René Hoffmann
Armin Kriele
Waldemar Smirnov
H. Obloh
Karlheinz Glorer
Brian Raynor
Rachid Driad
Nianjun Yang
Oliver Aneurin Williams
Christoph E. Nebel
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Citations (65)
Multilayer process of T-shaped transistor gates for GaAs-pseudomorphic HEMTs using e-beam resist technology and i-line negative resist with optical stepper lithography
1995
J. Schneider
Fred Becker
Karlheinz Glorer
Birgit Weismann
Norbert Muenzel
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