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Emilie Faivre

STMicroelectronics

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Embedded spectroscopic reflectometry metrology on FEOL silicon dioxide trench polishing equipment

2017 MIPRO | International Convention on Information and Communication Technology, Electronics and Microelectronics
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Nanostructural defects evidenced in failing silicon-based NMOS capacitors by advanced failure analysis techniques

2014 European Physical Journal-applied Physics
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Extraction of physical parameters on silicon nanocrystals devoted to non-volatile memories

2012 CAS | International Semiconductor Conference
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