author-photo

Tetsuya Nakai

Mitsubishi

4

Papers

9

Citations

Citation Trend

Filter By

Papers (3) Sort By

Journal Conference Others

Surface defects on SOI wafers and their influence on device characteristics

2003 Electronics and Communications in Japan Part Ii-electronics
Show All
- Source
- Cite
- Save
Citations (3)
Evaluation of surface defects on SIMOX and their influences on device characteristics

2000 Journal of Crystal Growth
Show All
- Source
- Cite
- Save
Citations (5)
Procede d'elimination des defauts d'un materiau monocristallin et materiau monocristallin dont les defauts sont elimines par ce procede

1999
Show All
- Source
- Cite
- Save
Citations (0)