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Sonny Maung
Sonny Maung
Texas Instruments
Ellipsometry
Electronic engineering
Analytical chemistry
Process control
Microelectronics
6
Papers
64
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Intelligent model‐based control system employing in situ ellipsometry
1994
Journal of Vacuum Science and Technology
Stephanie Watts Butler
Jerry A. Stefani
Michael Sullivan
Sonny Maung
Gabriel G. Barna
Steven A. Henck
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Citations (21)
Software integration of in-situ spectroscopic ellipsometry
1994
Sonny Maung
Steven A. Henck
Walter M. Duncan
Doug Mahlum
Chyi Sheng
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Citations (2)
Sensor integration into plasma etch reactors of a developmental pilot line
1994
Journal of Vacuum Science & Technology B
Gabriel G. Barna
Lee M. Loewenstein
K. J. Brankner
Stephanie Watts Butler
Purnendu K. Mozumder
Jerry A. Stefani
Steven A. Henck
P. Chapados
D Buck
Sonny Maung
Sharad Saxena
Amy Unruh
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Citations (6)
Practical use of an in-line vacuum metrology cluster in a minifactory environment
1994
Steven A. Henck
Phillip Chapados
Sonny Maung
Walter M. Duncan
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Citations (1)
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