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Jacek G. Smolinski
Jacek G. Smolinski
IBM
Electronic engineering
Integrated circuit design
Engineering
Reticle
Numerical aperture
4
Papers
22
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Model-based verification for first time right manufacturing
2005
James A. Bruce
Edward W. Conrad
Gregory J. Dick
D. John Nickel
Jacek G. Smolinski
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High-resolution ultraviolet defect inspection of DAP (darkfield alternate phase) reticles
1999
Lars W. Liebmann
Scott M. Mansfield
Alfred K. K. Wong
Jacek G. Smolinski
Song Peng
Kurt R. Kimmel
Maciej W. Rudzinski
James N. Wiley
Larry S. Zurbrick
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Citations (9)
High resolution ultraviolet defect inspection of DAP* reticles *darkfield alternate phase
1999
Lars W. Liebmann
Scott M. Mansfield
Alfred K. K. Wong
Jacek G. Smolinski
Song Peng
Kurt R. Kimmel
Maciej W. Rudzinski
James N. Wiley
Larry S. Zurbrick
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Positional errors due to substrate charging in e-beam lithography tools
1992
Maris A. Sturans
Jacek G. Smolinski
Jeffrey A. Robinson
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