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dazeyangyi
dazeyangyi
Resist
Immersion lithography
Nanotechnology
Materials science
Sulfonium
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ArF immersion lithography chemically amplified positive resist composition and a patterning process
2011
dazeyangyi
youiti oosawa
oohasi masaki
masaki oohasi
武志 佐々見
hatakeyama jun
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Sulfonium salts, resist materials and pattern forming method
2009
seigi tei hasi
dazeyangyi
youiti oosawa
hasegawa kouzi
kouzi hasegawa
kin nama tuyosi
tuyosi kin nama
tomohiro kobayasi
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