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Huan He
Huan He
DuPont
Optoelectronics
NAND gate
Materials science
Photoresist
Delamination
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Challenges and opportunities of KrF photoresist development for 3D NAND application
2020
Yang Song
Mingqi Li
Jong Park
Xisen Hou
Yusuke Matsuda
Cong Liu
Emad Aqad
Janet Wu
Huan He
Huiying Liu
Paul Baranowski
Cheng Bai Xu
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