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Inna Shmurun
Inna Shmurun
Nuclear chemistry
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Procede et appareil de nettoyage d'une chambre de cvd
2004
Maosheng Zhao
Juan Carlos Rocha-Alvarez
Inna Shmurun
Soova Sen
Mao D. Lim
Shankar Venkataraman
Ju-hyung Lee
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Methode und Apparat, eine Isolations-Schicht abzuscheiden
2000
Scott A. Hendrickson
Son T. Nguyen
Inna Shmurun
Shankar Venkataranan
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Appareil et méthode pour deposer une couche isolante
2000
Scott A. Hendrickson
Son T. Nguyen
Inna Shmurun
Shankar Venkataranan
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Verfahren und Vorrichtung zur Behandlung eines Halbleitersubtrats
1997
Gary Fong
Jonathan Frankel
Timothy E. Levine
Srinivas D. Nemani
Inna Shmurun
Irwin Silvestre
Visweswaren Sivaramakrishnan
Li Qun Xia
Ellie Yieh
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