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Hirokazu Washida
Hirokazu Washida
Toshiba
Nanoimprint lithography
Process control
Electronic engineering
Lithography
Next-generation lithography
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Process control technology for nanoimprint lithography
2018
Hirotaka Tsuda
Hirokazu Washida
Motofumi Komori
Takuya Kono
Tetsuro Nakasugi
Wooyung Jung
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