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N. Nakazaki
N. Nakazaki
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Electronic engineering
Engineering
Silicon on insulator
Wafer
2
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Probe card with probe pins grown by the vapor-liquid-solid (VLS) method
1996
IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A
S. Asai
Kazuo Kato
N. Nakazaki
Y. Nakajima
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