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Xiaobo Xie
Xiaobo Xie
ASML Holding
Extreme ultraviolet
Oblique illumination
Optical proximity correction
Chip
Ultraviolet
1
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6
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Fast 3D thick mask model for full-chip EUVL simulations
2013
Proceedings of SPIE
Peng Liu
Xiaobo Xie
Wei Liu
Keith Gronlund
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